Access to Rapid Prototyping techniques
Other materials might be possible, but it is mandatory to check with staff first.
Objective | NA | WD (mm) | FOV (µm) | System Noise (nm) |
5X EPI | 0.15 | 23.50 | 3508 x 2640 | 100 |
20X EPI | 0.45 | 4.50 | 877 x 660 | 8 |
50X ELWD | 0.60 | 11.00 | 351 x 264 | 5 |
50X DI | 0.55 | 3.40 | 338 x 283 | 1 |